Patents/Inventors

Minjoon Park

Albany, NYUS14 patents

7 Patents

US126205542026
Plasma Processing with Phase-locked Waveforms
Tokyo Electron Limited
0 cites
US125639902026
Densification and Reduction of Selectively Deposited Si Protective Layer for Mask Selectivity Improvement in HAR Etching
Tokyo Electron Limited
0 cites
US125123292025
Multi Level Contact Etch
TOKYO ELECTRON LIMITED
0 cites
US124630482025
Methods for Forming Semiconductor Devices Using Metal Hard Masks
Tokyo Electron Limited
0 cites
US123548422025
In-situ Focus Ring Coating
Tokyo Electron Limited
0 cites
US123343562025
Plasma Etching Tools and Systems
Tokyo Electron Limited
0 cites
US120401762024
Technologies for High Aspect Ratio Carbon Etching with Inserted Charge Dissipation Layer
Tokyo Electron Limited
0 cites