12 Patents
- US125052662025High-order Rotational Symmetry Unit-based Nonlinear Geometric Phase Metasurface
THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES
0 cites - US123064242025Metasurface-based Imaging System, Design Method, and Detector
THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES
0 cites - US122725302025Ultra-large Area Scanning Reactive Ion Etching Machine and Etching Method Thereof
The Institute Of Optics And Electronics, The Chinese Academy Of Sciences
0 cites - US122287102025Ultra-wide Angle Broadband Polarization Imaging System Based on Metasurface, and Detection Apparatus
THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES
0 cites - US120929602024Mask Topology Optimization Method and System for Surface Plasmon Near-field Photolithography
THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES
0 cites - US120789372024Near-field Lithography Immersion System, Immersion Unit and Interface Module Thereof
The Institute Of Optics And Electronics, The Chinese Academy Of Sciences
0 cites - US118680552024Multifunctional Lithography Device
The Institute Of Optics And Electronics, The Chinese Academy Of Sciences
0 cites - US117543522023Visible Light-transparent and Radiative-cooling Multilayer Film
The Institute Of Optics And Electronics, The Chinese Academy Of Sciences
0 cites - US117249622023Method for Etching Curved Substrate
The Institute Of Optics And Electronics, The Chinese Academy Of Sciences
0 cites - US117143582023Intelligent Correction Device Control System for Super-resolution Lithography Precision Mask
The Institute Of Optics And Electronics, The Chinese Academy Of Sciences
0 cites - US116752732023Method of Fabricating Micro-nano Structure
The Institute Of Optics And Electronics, The Chinese Academy Of Sciences
0 cites - US115926022023Sub-wavelength Structural Material Having Patch Type Array and Compatibility of Low Detectability for Infrared, Laser, and Microwave
The Institute Of Optics And Electronics, Chinese Academy Of Sciences
0 cites