Patents/Inventors

Minami Shouji

TokyoJP5 patents

6 Patents

US126092692026
Inspection System
Hitachi High-tech Corporation
0 cites
US126092742026
Charged Particle Beam Device
Hitachi High-tech Corporation
0 cites
US125735862026
Charged Particle Beam Apparatus
HITACHI HIGH-TECH CORPORATION
0 cites
US121968022025
Semiconductor Inspection Device and Method for Inspecting Semiconductor Sample
HITACHI HIGH-TECH CORPORATION
0 cites
US118697452024
Charged Particle Beam Device
HITACHI HIGH-TECH CORPORATION
0 cites
US116315682023
Device Defect Detection Method Using a Charged Particle Beam
HITACHI HIGH-TECH CORPORATION
0 cites