Patents/Inventors

Minako Inukai

YokohamaJP2 patents

3 Patents

US121721942024
Substrate Processing Apparatus and Substrate Processing Method
KIOXIA CORPORATION
0 cites
US118335502023
Substrate Processing Apparatus and Substrate Processing Method
Kioxia Corporation
0 cites
US116519532023
Method for Cleaning Substrate and Cleaning Device
Kioxia Corporation
0 cites