Min-yeong Moon

7 Patents

• US125717242026

  Single Wafer Orientation Tool-induced Shift Cleaning

  KLA Corporation

  0 cites
• US122098542025

  Methods and Systems for Measurement of Tilt and Overlay of a Structure

  KLA Corporation

  0 cites
• US121812712024

  Estimating In-die Overlay with Tool Induced Shift Correction

  KLA CORPORATION

  0 cites
• US121486392024

  Correcting Target Locations for Temperature in Semiconductor Applications

  KLA Corp.

  0 cites
• US118801422024

  Self-calibrating Overlay Metrology

  KLA Corporation

  0 cites
• US116040632023

  Self-calibrated Overlay Metrology Using a Skew Training Sample

  KLA Corporation

  0 cites
• US116044202023

  Self-calibrating Overlay Metrology

  KLA Corporation

  0 cites