Patents/Inventors

Min Sung Han

Gyeonggi-doKR3 patents

3 Patents

US122371512025
Apparatus and Method for Processing Substrate Using Plasma
SEMES CO, Ltd.
0 cites
US121761852024
Apparatus and Method for Processing Substrate Using Plasma
SEMES CO., Ltd.
0 cites
US119786542024
Substrate Processing Apparatus
SEMES CO., Ltd.
0 cites