Patents/Inventors

Miki Tamada

TokyoJP3 patents

4 Patents

US123728692025
Method for Forming Resist Pattern and Radiation-sensitive Resin Composition
JSR CORPORATION
0 cites
US117452162023
Method for Producing Film
JSR CORPORATION
0 cites
US116034802023
Composition for Underlayer Film Formation, Underlayer Film for Directed Self-assembled Film and Forming Method Thereof, and Directed Self-assembly Lithography Process
JSR CORPORATION
0 cites
US115782302023
Composition, Polymer, and Method of Producing Substrate
JSR CORPORATION
0 cites