Mike Schwarz

4 Patents

• US124482802025

  Bond Structures on MEMS Element and ASIC Element

  ROBERT BOSCH GmbH

  0 cites
• US121458402024

  MEMS Sensor as Well as Method for Operating a Mems Sensor

  ROBERT BOSCH GmbH

  0 cites
• US119522632024

  Micromechanical Sensor Device and Corresponding Manufacturing Method

  ROBERT BOSCH GmbH

  0 cites
• US116082642023

  Method for Manufacturing a Substrate Having a Region Mechanically Decoupled from a Support, Method for Manufacturing at Least One Spring, and a Substrate

  ROBERT BOSCH GmbH

  0 cites