Mihir S. Patel

3 Patents

• US126150272026

  Sensor with a Resonator Positioned at a Cavity of a Substrate

  Kampanics, L.L.C.

  0 cites
• US122123052025

  Semiconductor Device and Method of Forming High K T 2 High Q Acoustic Wave Resonator

  MACOM Technology Solutions Holdings, Inc.

  0 cites
• US119848632024

  Sensor with Resonator Supported on a Substrate

  Kampanics, L.L.C.

  0 cites