Patents/Inventors

Mihaela Balseanu

Sunnyvale, CAUS4 patents

4 Patents

US124313612025
Self-aligned Double Patterning with Spatial Atomic Layer Deposition
Applied Materials, Inc.
0 cites
US123621692025
Methods and Apparatus for Low Temperature Silicon Nitride Films
Applied Materials, Inc.
0 cites
US119903322024
Methods and Apparatus for Deposition of Low-k Films
Applied Materials, Inc.
0 cites
US118878182024
Methods and Systems to Modulate Film Stress
Applied Materials, Inc.
0 cites