Patents/Inventors

Michishige Saito

MiyagiJP7 patents

8 Patents

US124943492025
Member, Manufacturing Method of Member and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123004752025
Substrate Support and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US122886762025
Stage and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US119819932024
Forming Method of Component and Substrate Processing System
TOKYO ELECTRON LIMITED
0 cites
US119674872024
Forming Method of Component and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US119190322024
Film Forming Apparatus and Method for Manufacturing Part Having Film Containing Silicon
TOKYO ELECTRON LIMITED
0 cites
US117640402023
Placing Table and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117421832023
Plasma Processing Apparatus and Control Method
TOKYO ELECTRON LIMITED
0 cites