Patents/Inventors

Michiko Nakaya

MiyagiJP5 patents

6 Patents

US120805212024
Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US120716872024
Plasma Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US118043792023
Etching Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117495082023
Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US117281762023
Treatment Method
Tokyo Electron Limited
0 cites
US116996142023
Film Deposition Method and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites