Patents/Inventors

Michiel Kupers

VeldhovenNL3 patents

4 Patents

US120449812024
Method and Apparatus for Optimization of Lithographic Process
ASML NETHERLANDS B.V.
0 cites
US117823492023
Methods of Determining Corrections for a Patterning Process, Device Manufacturing Method, Control System for a Lithographic Apparatus and Lithographic Apparatus
ASML NETHERLANDS B.V.
0 cites
US117748622023
Method of Obtaining Measurements, Apparatus for Performing a Process Step, and Metrology Apparatus
ASML NETHERLANDS B.V.
0 cites
US115927532023
Methods of Determining Corrections for a Patterning Process, Device Manufacturing Method, Control System for a Lithographic Apparatus and Lithographic Apparatus
ASML Netherlands B.V.
0 cites