Patents/Inventors

Michal Danek

Cupertino, CAUS12 patents

11 Patents

US125300212026
Performance Predictors for Semiconductor-manufacturing Processes
Lam Research Corporation
0 cites
US124446512025
Tungsten Feature Fill with Nucleation Inhibition
Novellus Systems, Inc.
0 cites
US123621882025
Method for Preventing Line Bending During Metal Fill Process
Lam Research Corporation
0 cites
US123313962025
Systems and Methods for Homogenous Intermixing of Precursors in Alloy Atomic Layer Deposition
LAM RESEARCH CORPORATION
0 cites
US122372212025
Nucleation-free Tungsten Deposition
Lam Research Corporation
0 cites
US122031682025
Metal Deposition
Lam Research Corporation
0 cites
US121486232024
Deposition of Tungsten on Molybdenum Templates
Lam Research Corporation
0 cites
US120740292024
Molybdenum Deposition
Lam Research Corporation
0 cites
US119012272024
Feature Fill with Nucleation Inhibition
Lam Research Corporation
0 cites
US118364292023
Determination of Recipes for Manufacturing Semiconductor Devices
Lam Research Corporation
0 cites
US118279762023
Systems and Methods for Homogenous Intermixing of Precursors in Alloy Atomic Layer Deposition
LAM RESEARCH CORPORATION
0 cites