Patents/Inventors

Michael X. Yang

Palo Alto, CAUS12 patents

13 Patents

US123990642025
Systems and Methods for Thermal Processing and Temperature Measurement of a Workpiece at Low Temperatures
Mattson Technology, Inc.
0 cites
US121746162024
Control System for Adaptive Control of a Thermal Processing System
Mattson Technology, Inc.
0 cites
US121192162024
Arc Lamp with Forming Gas for Thermal Processing Systems
Mattson Technology, Inc.
0 cites
US120805682024
Support Plate for Localized Heating in Thermal Processing Systems
Beijing E-town Semiconductor Technology Co., Ltd.
0 cites
US120149202024
Apparatus for Hydrogen Assisted Atmospheric Radical Oxidation
Beijing E-town Semiconductor Technology Co., Ltd.
0 cites
US118125232023
Thermal Processing System with Transmission Switch Plate
MATTSON TECHNOLOGY, Inc.
0 cites
US117911662023
Selective Etch Process Using Hydrofluoric Acid and Ozone Gases
MATTSON TECHNOLOGY, Inc.
0 cites
US117911812023
Methods for the Treatment of Workpieces
MATTSON TECHNOLOGY, Inc.
0 cites
US117640722023
Method for Processing a Workpiece Using a Multi-cycle Thermal Treatment Process
Mattson Technology, Inc.
0 cites
US117215392023
Arc Lamp with Forming Gas for Thermal Processing Systems
MATTSON TECHNOLOGY, Inc
0 cites
US116996032023
Thermal Processing System with Temperature Non-uniformity Control
MATTSON TECHNOLOGY, Inc.
0 cites
US116448172023
Control System for Adaptive Control of a Thermal Processing System
MATTSON TECHNOLOGY, Inc.
0 cites
US115861132023
Methods and Apparatus for Post Exposure Bake Processing of a Workpiece
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., Ltd
0 cites