Patents/Inventors

Michael Stolz

OberkochenDE0 patents

2 Patents

US123211052025
Projection Exposure Apparatus for Semiconductor Lithography
Carl Zeiss SMT GmbH
0 cites
US123211062025
Device for Detecting a Temperature, Installation for Producing an Optical Element and Method for Producing an Optical Element
CARL ZEISS SMT GmbH
0 cites