Patents/Inventors

Michael Steigerwald

Milpitas, CAUS4 patents

5 Patents

US122834532025
Creating Multiple Electron Beams with a Photocathode Film
KLA Corporation
0 cites
US121658312024
Method and System of Image-forming Multi-electron Beams
KLA CORPORATION
0 cites
US121041142024
Solution-processable Superatomic Thin-films
The Trustees Of Columbia University In The City Of New York
0 cites
US120681292024
Tilt-column Multi-beam Electron Microscopy System and Method
KLA Corporation
0 cites
US117494952023
Bandpass Charged Particle Energy Filtering Detector for Charged Particle Tools
KLA Corp.
0 cites