Patents/Inventors

Michael Philip Roberts

Tigard, ORUS9 patents

8 Patents

US125312202026
Automated Feedforward and Feedback Sequence for Patterning CD Control
Lam Research Corporation
0 cites
US124008802025
Apparatuses for Uniform Fluid Delivery in a Multi-station Semiconductor Processing Chamber
Lam Research Corporation
0 cites
US123082642025
Rapid Tuning of Critical Dimension Non-uniformity by Modulating Temperature Transients of Multi-zone Substrate Supports
Lam Research Corporation
0 cites
US122093122025
Temperature Control of a Multi-zone Pedestal
LAM RESEARCH CORPORATION
0 cites
US121868512025
Use of Vacuum During Transfer of Substrates
Lam Research Corporation
0 cites
US121425092024
Electrostatic Chuck with Seal Surface
Lam Research Corporation
0 cites
US121105862024
Pedestals for Modulating Film Properties in Atomic Layer Deposition (ALD) Substrate Processing Chambers
LAM RESEARCH CORPORATION
0 cites
US120716892024
Trim and Deposition Profile Control with Multi-zone Heated Substrate Support for Multi-patterning Processes
Lam Research Corporation
0 cites