Michael N. Grimbergen

3 Patents

• US120666392024

  Adjustable Achromatic Collimator Assembly for Endpoint Detection Systems

  Applied Materials, Inc.

  0 cites
• US120076862024

  Etch Processing System Having Reflective Endpoint Detection

  Applied Materials, Inc.

  0 cites
• US117199522023

  Adjustable Achromatic Collimator Assembly for Endpoint Detection Systems

  Applied Materials, Inc.

  0 cites