Michael Marinus Anna Steur

3 Patents

• US124746452025

  Object Table, Stage Apparatus, Holding Method and Lithographic Apparatus

  ASML NETHERLANDS B.V.

  0 cites
• US123157562025

  Method of Manufacturing a Substrate Support for a Lithographic Apparatus, Substrate Table, Lithographic Apparatus, Device Manufacturing Method, Method of Use

  ASML NETHERLANDS B.V.

  0 cites
• US118801442024

  Object Table, a Stage Apparatus and a Lithographic Apparatus

  ASML NETHERLANDS B.V.

  0 cites