Patents/Inventors

Michael Kubis

MeerbuschDE4 patents

3 Patents

US125478152026
Multiscale Physical Etch Modeling and Methods Thereof
ASML NETHERLANDS B.V.
0 cites
US124293282025
Metrology Method, Target and Substrate
ASML NETHERLANDS B.V.
0 cites
USRE0494602023
Inspection Method and Apparatus and Lithographic Processing Cell
ASML NETHERLANDS B.V.
0 cites