Michael J. Janicki

4 Patents

• US124802082025

  Dynamic Sheath Control with Edge Ring Lift

  Lam Research Corporation

  0 cites
• US118374952023

  Carrier Ring Designs for Controlling Deposition on Wafer Bevel/edge

  Lam Research Corporation

  0 cites
• US118307592023

  Carrier Ring Designs for Controlling Deposition on Wafer Bevel/edge

  Lam Research Corporation

  0 cites
• US116199252023

  Remote-plasma Clean (RPC) Directional-flow Device

  Lam Research Corporation

  0 cites