Patents/Inventors

Michael D. Willwerth

Campbell, CAUS11 patents

11 Patents

US125371792026
Capacitive Sensing Data Integration for Plasma Chamber Condition Monitoring
Applied Materials, Inc.
0 cites
US124379792025
Capacitive Sensors and Capacitive Sensing Locations for Plasma Chamber Condition Monitoring
Applied Materials, Inc.
0 cites
US124051642025
Spatial Optical Emission Spectroscopy for Etch Uniformity
Applied Materials, Inc.
0 cites
US121639112024
Capacitive Sensor Housing for Chamber Condition Monitoring
Applied Materials, Inc.
0 cites
US121305612024
Gas Distribution Plate with UV Blocker
APPLIED MATERIALS, Inc.
0 cites
US120681352024
Fast Gas Exchange Apparatus, System, and Method
Applied Materials, Inc.
0 cites
US120092362024
Sensors and System for In-situ Edge Ring Erosion Monitor
Applied Materials, Inc.
0 cites
US116686022023
Spatial Optical Emission Spectroscopy for Etch Uniformity
Applied Materials, Inc.
0 cites
US115812062023
Capacitive Sensor for Chamber Condition Monitoring
Applied Materials, Inc.
0 cites
US115519052023
Resonant Process Monitor
Intel Corporation
0 cites
US115453462023
Capacitive Sensing Data Integration for Plasma Chamber Condition Monitoring
Applied Materials, Inc.
0 cites