Patents/Inventors

Michael C. Zabka

New Prague, MNUS6 patents

5 Patents

US125936472026
Remote Optimization of Purge Flow Rates in a Container
ENTEGRIS, Inc.
0 cites
US123121272025
Process Carrier
ENTEGRIS, Inc.
0 cites
US119012052024
Membrane Diffuser for a Substrate Container
ENTEGRIS, Inc.
0 cites
US116107952023
Membrane Diffuser for a Substrate Container
ENTEGRIS, Inc.
0 cites
US115812092023
Environmental Control Material Holder
ENTEGRIS, Inc.
0 cites