Patents/Inventors

Michael C. Kellogg

Oakland, CAUS3 patents

3 Patents

US125623562026
Linear Arrangement for Substrate Processing Tools
LAM RESEARCH CORPORATION
0 cites
US121005752024
Plasma Processing Devices Having Multi-port Valve Assemblies
Lam Research Corporation
0 cites
US117640862023
Wafer Transport Assembly with Integrated Buffers
LAM RESEARCH CORPORATION
0 cites