Michael Budach

8 Patents

• US124932382025

  Method, Device and Computer Program for Repairing a Mask Defect

  Carl Zeiss SMT GmbH

  0 cites
• US122926802025

  Method and Apparatuses for Disposing of Excess Material of a Photolithographic Mask

  Carl Zeiss SMT GmbH

  0 cites
• US121642262024

  Method and Apparatuses for Disposing of Excess Material of a Photolithographic Mask

  Carl Zeiss SMT GmbH

  0 cites
• US121355402024

  Devices and Methods for Examining And/or Processing an Element for Photolithography

  Carl Zeiss SMT GmbH

  0 cites
• US118745982024

  Method and Apparatuses for Disposing of Excess Material of a Photolithographic Mask

  Carl Zeiss SMT GmbH

  0 cites
• US117331862023

  Device and Method for Analyzing a Defect of a Photolithographic Mask or of a Wafer

  Carl Zeiss SMT GmbH

  0 cites
• US116504952023

  Apparatus and Method for Determining a Position of an Element on a Photolithographic Mask

  Carl Zeiss SMT GmbH

  0 cites
• US115924612023

  Apparatus and Method for Examining And/or Processing a Sample

  Carl Zeiss SMT GmbH

  0 cites