Patents/Inventors

Michael Bowes

Scotts Valley, CAUS2 patents

3 Patents

US124761432025
Backside Reactive Inhibition Gas
Lam Research Corporation
0 cites
US122610812025
Tungsten Feature Fill with Inhibition Control
Lam Research Corporation
0 cites
US120026792024
High Step Coverage Tungsten Deposition
Lam Research Corporation
0 cites