Patents/Inventors

Merritt Funk

Austin, TXUS10 patents

11 Patents

US124513272025
Apparatus for Plasma Processing
TOKYO ELECTRON LIMITED
0 cites
US122725202025
Process Control Enabled VDC Sensor for Plasma Process
Tokyo Electron Limited
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US122241642025
Radio Frequency (RF) System with Embedded RF Signal Pickups
Tokyo Electron Limited
0 cites
US121761832024
RF Voltage and Current (V-I) Sensors and Measurement Methods
Tokyo Electron Limited
0 cites
US121192072024
Apparatus for Plasma Processing
Tokyo Electron Limited
0 cites
US120743902024
Parallel Resonance Antenna for Radial Plasma Control
Tokyo Electron Limited
0 cites
US120572932024
Methods for Real-time Pulse Measurement and Pulse Timing Adjustment to Control Plasma Process Performance
Tokyo Electron Limited
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US118172962023
RF Voltage and Current (V-I) Sensors and Measurement Methods
Tokyo Electron Limited
0 cites
US117281352023
Electric Pressure Systems for Control of Plasma Properties and Uniformity
TOKYO ELECTRON LIMITED
0 cites
US117215242023
Power Generation Systems and Methods for Plasma Stability and Control
Tokyo Electron Limited
0 cites
US116004742023
RF Voltage and Current (V-I) Sensors and Measurement Methods
Tokyo Electron Limited
0 cites