Patents/Inventors

Merrett Wong

San Carlos, CAUS1 patent

2 Patents

US123225712025
Multi-state RF Pulsing to Control Mask Shape and Breaking Selectivity Versus Process Margin Trade-off
Lam Research Corporation
0 cites
US122781122025
Multiple State Pulsing for High Aspect Ratio Etch
Lam Research Corporation
0 cites