8 Patents
- US124760912025Electrostatic Chuck and Method of Operation for Plasma Processing
Tokyo Electron Limited
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- US122760232025Showerhead Assembly for Distributing a Gas Within a Reaction Chamber
ASM IP Holding B.V.
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- US119763612024Methods for Depositing a Transition Metal Nitride Film on a Substrate by Atomic Layer Deposition and Related Deposition Apparatus
ASM IP Holding B.V.
0 cites - US117742982023Multi-point Thermocouples and Assemblies for Ceramic Heating Structures
TOKYO ELECTRON LIMITED
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