Meihua Shen

3 Patents

• US120805922024

  Film Stack Simplification for High Aspect Ratio Patterning and Vertical Scaling

  Lam Research Corporation

  0 cites
• US118325332023

  Conformal Damage-free Encapsulation of Chalcogenide Materials

  Lam Research Corporation

  0 cites
• US117929872023

  Self-aligned Vertical Integration of Three-terminal Memory Devices

  LAM RESEARCH CORPORATION

  0 cites