Patents/Inventors

Mei Chang

Saratoga, CAUS7 patents

7 Patents

US124068492025
Methods and Apparatus for Enhancing Selectivity of Titanium and Titanium Silicides During Chemical Vapor Deposition
APPLIED MATERIALS, Inc.
0 cites
US119461352024
Low Temperature Deposition of Iridium Containing Films
Applied Materials, Inc.
0 cites
US118878552024
Methods for Depositing Fluorine/carbon-free Conformal Tungsten
APPLIED MATERIALS, Inc.
0 cites
US116580142023
Apparatuses and Methods of Protecting Nickel and Nickel Containing Components with Thin Films
APPLIED MATERIALS, Inc.
0 cites
US116437212023
Low Temperature Deposition of Iridium Containing Films
Applied Materials, Inc.
0 cites
US116284562023
Apparatus for Increasing Flux from an Ampoule
Applied Materials, Inc.
0 cites
US115980032023
Substrate Processing Chamber Having Heated Showerhead Assembly
APPLIED MATERIALS, Inc.
0 cites