Mehmet Ali Akbas

5 Patents

• US125299672026

  Method to Manufacture Nano Ridges in Hard Ceramic Coatings

  ASML Holding N.V.

  0 cites
• US123211042025

  Substrate Holder for Use in a Lithographic Apparatus

  ASML HOLDING N.V.

  0 cites
• US121893102025

  Systems and Methods for Manufacturing a Double-sided Electrostatic Clamp

  ASML HOLDING N.V.

  0 cites
• US121115812024

  Method to Manufacture Nano Ridges in Hard Ceramic Coatings

  ASML Holding N.V.

  0 cites
• US118878812024

  Lithographic Apparatus, Substrate Table, and Non-uniform Coating Method

  ASML HOLDING N.V.

  0 cites