Patents/Inventors

Megan Wooley

Austin, TXUS2 patents

3 Patents

US121121072024
Virtual Metrology for Wafer Result Prediction
Tokyo Electron Limited
0 cites
US118681192024
Method and Process Using Fingerprint Based Semiconductor Manufacturing Process Fault Detection
Tokyo Electron Limited
0 cites
US118697562024
Virtual Metrology Enhanced Plasma Process Optimization Method
Tokyo Electron Limited
0 cites