Patents/Inventors

Meehyun Lim

Suwon-siKR8 patents

7 Patents

US125623572026
Apparatus for Monitoring a Plasma Process
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US125557572026
Semiconductor Equipment Monitoring Apparatus, and Semiconductor Equipment Including the Semiconductor Equipment Monitoring Apparatus
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US123322982025
Semiconductor Test Device and System and Test Method Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US122352872025
Substrate Processing Apparatus
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US121702332024
Plasma Treatment Apparatus, a Method of Monitoring a Process of Manufacturing a Semiconductor Device by Using the Same, and a Method of Manufacturing a Semiconductor Device Including the Monitoring Method
Samsung Electronics Co., Ltd.
0 cites
US121051322024
Electric Field Measuring Apparatus and Method of Measuring Electric Field Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US117820852023
Semiconductor Test Device and System and Test Method Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites