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Inventors
Mayuka Osaki
Tokyo
JP
2 patents
3 Patents
US12500061
2025
Observation System, Observation Method, and Program
Hitachi High-tech Corporation
0 cites
US12142457
2024
Charged Particle Beam Device
Hitachi High-tech Corporation
0 cites
US11545336
2023
Scanning Electron Microscopy System and Pattern Depth Measurement Method
HITACHI HIGH-TECH CORPORATION
0 cites