Patents/Inventors

Maurits Van Der Schaar

EindhovenNL16 patents

13 Patents

US125108292025
Method and Apparatus for Design of a Metrology Target
ASML NETHERLANDS B.V.
0 cites
US124293282025
Metrology Method, Target and Substrate
ASML NETHERLANDS B.V.
0 cites
US123211012025
Method for Applying a Deposition Model in a Semiconductor Manufacturing Process
ASML NETHERLANDS B.V.
0 cites
US122769212025
Substrate Comprising a Target Arrangement, and Associated at Least One Patterning Device, Lithographic Method and Metrology Method
ASML Netherlands B.V.
0 cites
US122422032025
Target for Measuring a Parameter of a Lithographic Process
ASML Netherlands B.V.
0 cites
US122048262025
Method and Apparatus for Inspection and Metrology
ASML NETHERLANDS B.V.
0 cites
US121054322024
Metrology Method and Associated Computer Product
ASML Netherlands B.V.
0 cites
US120667642024
Metrology Apparatus and Method for Determining a Characteristic of One or More Structures on a Substrate
ASML Netherlands B.V.
0 cites
US120193772024
Target for Measuring a Parameter of a Lithographic Process
ASML Netherlands B.V.
0 cites
US119829462024
Metrology Targets
ASML HOLDING N.V.
0 cites
US117094362023
Metrology Apparatus and Method for Determining a Characteristic of One or More Structures on a Substrate
ASML Netherlands B.V.
0 cites
US116983462023
Methods and Apparatus for Monitoring a Manufacturing Process, Inspection Apparatus, Lithographic System, Device Manufacturing Method
ASML NETHERLANDS B.V.
0 cites
US115802742023
Method and Apparatus for Inspection and Metrology
ASML NETHERLANDS B.V.
0 cites