Matti Malila

3 Patents

• US125903672026

  Precursor Supply Chamber

  BENEQ OY

  0 cites
• US119707732024

  Apparatus and Method for Atomic Layer Deposition (ALD)

  BENEQ OY

  0 cites
• US115497022023

  Precursor Supply Cabinet

  BENEQ OY

  0 cites