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Inventors
Matti Liukku
Helsinki
FI
14 patents
10 Patents
US12528693
2026
Motion Limiter with Reduced Stiction
MURATA MANUFACTURING CO., Ltd.
0 cites
US12507594
2025
Piezoelectric Device
MURATA MANUFACTURING CO., Ltd.
0 cites
US12474366
2025
Three-axis Accelerometer with Two Masses
MURATA MANUFACTURING CO., Ltd.
0 cites
US12428291
2025
In-plane and Out-of-plane Accelerometer
MURATA MANUFACTURING CO., Ltd.
0 cites
US12262176
2025
Transducer
MURATA MANUFACTURING CO., Ltd.
0 cites
US11977094
2024
Seesaw Accelerometer
MURATA MANUFACTURING CO., Ltd.
0 cites
US11979713
2024
Piezoelectric Device
MURATA MANUFACTURING CO., Ltd.
0 cites
US11867714
2024
Accelerometer with Two Seesaws
MURATA MANUFACTURING CO., Ltd.
0 cites
US11820648
2023
Vibration Damping in MEMS Acceleration Sensors
MURATA MANUFACTURING CO., Ltd.
0 cites
US11796560
2023
MEMS Accelerometer with Mechanically Decoupled Proof Mass
MURATA MANUFACTURING CO., Ltd.
0 cites