Patents/Inventors

Matthias Manger

AalenDE13 patents

8 Patents

US126207762026
Control Device, Control System, Method for Operating a Control System
CARL ZEISS SMT GmbH
0 cites
US125786542026
Method for Calibrating a Manipulable Optical Module
Carl Zeiss SMT GmbH
0 cites
US124431102025
Optical Assembly, Method for Controlling an Optical Assembly, and Projection Exposure Apparatus
Carl Zeiss SMT GmbH
0 cites
US123728772025
Projection Exposure Apparatus for Semiconductor Lithography
Carl Zeiss SMT GmbH
0 cites
US122769162025
Drive Device, Optical System and Lithography Apparatus
Carl Zeiss SMT GmbH
0 cites
US121305572024
Optical System and Lithography Apparatus
Carl Zeiss SMT GmbH
0 cites
US119209772024
Metrology System and Method for Measuring an Excitation Laser Beam in an EUV Plasma Source
Carl Zeiss SMT GmbH
0 cites
US117371992023
Device and Method for Measuring the Beam Angle of a Light Beam Guided by a Beam Guiding Optical Unit
Carl Zeiss SMT GmbH
0 cites