5 Patents
- US125785352026Optical Waveguide Component and Method for the Production Thereof
Karlsruher Institut Für Technologie
0 cites - US122820402025Micro-optomechanical System and Method for the Production Thereof
Karlsruher Institut Für Technologie
0 cites - 0 cites
- US121893012025Method for Producing an Optical System and Optical System
Karlsruhe Institute Of Technology
0 cites - US116303942023Method and Device for Lithographically Producing a Target Structure on a Non-planar Initial Structure
Karlsruhe Institute Of Technology
0 cites