Patents/Inventors

Matthew Spuller

Belmont, CAUS8 patents

7 Patents

US125403842026
Plasma Processing with Tunable Nitridation
Applied Materials, Inc.
0 cites
US123476792025
System and Method for Radical and Thermal Processing of Substrates
Applied Materials, Inc.
0 cites
US123277632025
Treatment Methods for Titanium Nitride Films
APPLIED MATERIALS, Inc.
0 cites
US119786462024
Thermal Chamber with Improved Thermal Uniformity
Applied Materials, Inc.
0 cites
US118239012023
System and Method for Radical and Thermal Processing of Substrates
APPLIED MATERIALS Inc.
0 cites
US118172972023
System and Method for Managing Substrate Outgassing
Applied Materials, Inc.
0 cites
US115877892023
System and Method for Radical and Thermal Processing of Substrates
Applied Materials, Inc.
0 cites