Matthew Scott Weimer

4 Patents

• US124354122025

  High Density, Modulus, and Hardness Amorphous Carbon Films at Low Pressure

  Lam Research Corporation

  0 cites
• US123593112025

  Conformal Deposition of Silicon Carbide Films Using Heterogeneous Precursor Interaction

  Lam Research Corporation

  0 cites
• US123343322025

  Remote Plasma Based Deposition of Silicon Carbide Films Using Silicon-containing and Carbon-containing Precursors

  Lam Research Corporation

  0 cites
• US118374412023

  Depositing a Carbon Hardmask by High Power Pulsed Low Frequency RF

  Lam Research Corporation

  0 cites