13 Patents
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- US125345792026Organoamino-functionalized Linear and Cyclic Oligosiloxanes for Deposition of Silicon-containing Films
Versum Materials US, LLC
0 cites - US124802062025Organoaminodisilazanes for High Temperature Atomic Layer Deposition of Silicon Oxide Thin Films
Versum Materials US, LLC
0 cites - US122304962025Organoaminosilane Precursors and Methods for Depositing Films Comprising Same
VERSUM MATERIALS US, LLC
0 cites - US120573102024Functionalized Cyclosilazanes as Precursors for High Growth Rate Silicon-containing Films
Versum Materials US, LLC
0 cites - US120180402024Organoamino-functionalized Cyclic Oligosiloxanes for Deposition of Silicon-containing Films
Versum Materials US, LLC
0 cites - US119524652024Organoamino-functionalized Linear and Cyclic Oligosiloxanes for Deposition of Silicon-containing Films
VERSUM MATERIALS US, LLC
0 cites - US119127302024Organoamino-functionalized Cyclic Oligosiloxanes for Deposition of Silicon-containing Films
Versum Materials US, LLC
0 cites - US117027432023Trisilylamine Derivatives as Precursors for High Growth Rate Silicon-containing Films
Versum Materials US, LLC
0 cites - 0 cites
- US116315802023Formulation for Deposition of Silicon Doped Hafnium Oxide as Ferroelectric Materials
Versum Materials US, LLC
0 cites - US115916922023Organoamino-polysiloxanes for Deposition of Silicon-containing Films
Versum Materials US, LLC
0 cites - US115848542023Compositions and Methods for the Deposition of Silicon Oxide Films
Versum Materials US, LLC
0 cites