Patents/Inventors

Matthew Minakais

San Diego, CAUS2 patents

3 Patents

US123604662025
Maintenance of Modules for Light Sources Used in Semiconductor Photolithography
Cymer, LLC
0 cites
US122164112025
Predictive Apparatus in a Gas Discharge Light Source
Cymer, LLC
0 cites
US120076962024
Burst Statistics Data Aggregation Filter
Cymer, LLC
0 cites