Patents/Inventors

Matthew James Busche

Santa Clara, CAUS2 patents

3 Patents

US124244132025
Substrate Support with Real Time Force and Film Stress Control
Applied Materials, Inc.
0 cites
US119159132024
Substrate Support with Real Time Force and Film Stress Control
APPLIED MATERIALS, Inc.
0 cites
US116768022023
Substrate Support with Real Time Force and Film Stress Control
Applied Materials, Inc.
0 cites