Patents/Inventors

Matthew Flaugh

Albany, NYUS4 patents

3 Patents

US125123272025
Surface Modification to Achieve Selective Isotropic Etch
Tokyo Electron Limited
0 cites
US122725582025
Selective and Isotropic Etch of Silicon Over Silicon-germanium Alloys and Dielectrics; via New Chemistry and Surface Modification
Tokyo Electron Limited
0 cites
US117156432023
Gas Phase Etch with Controllable Etch Selectivity of Metals
TOKYO ELECTRON LIMITED
0 cites