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Inventors
Matsutaro Miyamoto
Tokyo
JP
5 patents
6 Patents
US12288707
2025
Substrate Holder
EBARA CORPORATION
0 cites
US11718925
2023
Holder for Holding Substrate and System for Plating
EBARA CORPORATION
0 cites
US11697886
2023
Substrate Holder
EBARA CORPORATION
0 cites
US11676837
2023
Substrate Holder
EBARA CORPORATION
0 cites
US11668018
2023
Contact Structure, Substrate Holder, Apparatus for Plating, and Method of Feeding Electric Power to Substrate
EBARA CORPORATION
0 cites
US11542625
2023
Substrate Holder
EBARA CORPORATION
0 cites