Patents/Inventors

Masayuki Tomoyasu

Hwaseong-siKR2 patents

3 Patents

US118374962023
Substrate Processing Apparatus and Method of Processing a Substrate
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US118172982023
Focus Ring, Chuck Assembly for Securing a Substrate and Plasma Treatment Apparatus Having the Same
Samsung Electronics Co., Ltd.
0 cites
US117911942023
Substrate Processing Apparatus and Method of Processing a Substrate
SAMSUNG ELECTRONICS CO., Ltd.
0 cites