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Inventors
Masayuki Takeda
Yachiyo
JP
4 patents
3 Patents
US12571382
2026
Turbomolecular Pump
Edwards Japan Limited
0 cites
US12549197
2026
Conversion Device, Conversion Method, Reverse Conversion Device, Reverse Conversion Method, and Program
KEIO UNIVERSITY
0 cites
US12078178
2024
Vacuum Pump and Control Device
Edwards Japan Limited
0 cites